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光纤微纳结构传感器具有体积小、质量轻、抗电磁干扰和灵敏度高等优点,已成为各领域不可或缺的传感器件.本文简要介绍了飞秒激光改性区选择性化学腐蚀加工光纤微纳结构的方法,并根据传感器工作原理,将所得传感器件分为干涉型、衍射型和复合型3种.重点阐述了各类型器件的结构和性能,并对运用该方法制作的光纤微纳结构进行总结和展望.
Optical micro-nano sensor has the advantages of small size, light weight, anti-electromagnetic interference and high sensitivity, it has become an indispensable sensor in various fields.In this paper, the selective microanalysis , And according to the working principle of the sensor, the sensor devices are divided into interference type, diffraction type and compound type 3. The structure and performance of each type of device are mainly described, and the optical fiber micro-nano structure fabricated by the method is summarized And outlook.