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针对大口径平面光学元件全频谱面形技术指标的高效率、高精度收敛,研究了环形抛光技术。考虑环抛机沥青蜡盘的平面度直接影响工件面形的收敛效率,本文利用准直激光束作为参考,设计研制了测量精度高,重复性精度达到±1μm的大型环抛机抛光蜡盘平面度测量专用装置。分析了环抛过程中蜡盘表面平面度和工件面型PV值之间的变化规律和相关性,根据测量数据得出了蜡盘平面度数据和工件面形的对应关系。实验显示:当平面度和面形曲线相差较大时,工件面形可快速收敛至1λ左右,并由粗抛向精抛工序快速过渡。提出的大型环抛机抛光蜡盘平面度监测装置实现了对湿滑胶体平面的高精度、快速测量,为环抛的确定性抛光工艺提供了重要的技术支持。
Aiming at the high-efficiency and high-precision convergence of the technical indicators of the full-spectrum planar optical element with large aperture, the annular polishing technique was studied. Considering that the flatness of ring-shaped asphalt paraboloid directly affects the convergence efficiency of workpiece surface shape, this paper uses the collimated laser beam as a reference to design a large ring polishing machine with a high precision and repeatability of ± 1μm Degree measurement special device. The variation regularity and correlation between the wax surface flatness and work piece surface PV value in the process of ring polishing are analyzed. The corresponding relationship between the wax flatness data and the work piece surface shape is obtained according to the measured data. Experiments show that when the flatness and the curve of profile differ greatly, the profile of the workpiece can converge rapidly to about 1λ, and the rapid transition from rough throw to fine throwing process. The proposed large loop polishing machine polishing wax flatness monitoring device to achieve a high-precision wet glue plane, rapid measurement, ring polishing for the determination of the polishing provides an important technical support.