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一、引言卢瑟福背散射分析方法(RBS)是一种无损快速的表面(10(?)～10nm)分析技术。它能给出以下几方面的信息:1.表面薄层的厚度及元素组成;2.元素的含量,3.元素的深度分布剖面。所以它对薄膜材料的研究,提供了一种有效的分析手段。
I. Introduction Rutherford backscattering analysis (RBS) is a nondestructive and rapid surface (10 (?) ~ 10nm) analytical technique. It gives the following information: 1. The thickness of the surface layer and its elemental composition; 2. The content of the element; 3. The depth profile of the element. Therefore, it provides an effective analytical method for the research of thin film materials.