The birefringence grating and the surface grating in azobenzene polymer liquid-crystal (Azo-PLC) films are studied by a near-field scanning optical microscope. With laser irradiation, the refractive index change caused by birefringence and the sinusoidal surface profile are observed at the near-field transmittance image and the surface topography of the grating. The grating period and the peak-to-peak value of the sinusoidal surface profile ar e0.8 μm and 40nm, respectively. The maximum diffractive efficiency of the grating is 2%. The dynamic process of the grating formation is probed and analysed. The mass diffusion responsible for the formation of the surface grating due to the temperature rise is analysed.