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对金属介质多层膜样品进行不同温度的退火处理。实验发现,当退火温度为350℃时,在样品Au层与SiO_2层的界面处出现过渡层,样品具有很强的抗化学清洗能力。利用透射电子显微镜观测与能谱仪分析发现,过渡层的出现主要是Cr原子从Au层底部扩散到SiO_2层的结果。过渡层可以增强Au层与SiO_2层间的粘附力,阻挡酸溶液的渗入,使得金属介质多层膜的抗化学清洗能力得到增强。
The metal dielectric multilayer samples were annealed at different temperatures. The experimental results show that when the annealing temperature is 350 ℃, a transition layer appears at the interface between the sample Au layer and the SiO 2 layer, and the sample has strong resistance to chemical cleaning. Transmission electron microscopy and energy dispersive spectroscopy analysis showed that the appearance of the transition layer was mainly due to the diffusion of Cr atoms from the bottom of the Au layer to the SiO 2 layer. The transition layer can enhance the adhesion between the Au layer and the SiO 2 layer and prevent the infiltration of the acid solution, so that the chemical cleaning ability of the metal-dielectric multilayer film is enhanced.