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在ＭＢＥ生长“ＤＢＲ型结构性材料”的过程中，由于生长中的多层结构干涉效应，使高温黑体辐射谱呈现振荡现象，利用此现象辅以计算机数据拟合，可以实现ＭＢＥ生长中层次、组分和厚度的实时监控，对ＭＢＥ系统生长垂直腔型结构材料的实时质量监控有重要意义．我们首次在国内采用这项技术，利用红外高温仪对ＶＣＳＥＬ器件生长全过程（包括谐振腔）及多种组分ＤＢＲ的表观衬底热辐射振荡进行监测，采用准黑体模型，结合扫描电镜、光反射谱等结果进行了分析，理论与实验得到了较好的吻合．
MBE growth in the “DBR-type structural material” process, due to the growth of multi-layer structure of the interference effect, the high temperature blackbody radiance oscillation phenomenon, the use of this phenomenon complemented by computer data fitting, MBE growth can be achieved in the hierarchy, The real-time monitoring of the composition and thickness is of great significance to the real-time quality monitoring of the vertical cavity structure material grown by MBE system. For the first time in China, we use this technology to monitor the thermal radiation oscillation of the apparent growth of the VCSEL device (including the resonant cavity) and various components of the DBR using an infrared pyrometer. Using a quasi-black body model, combined with scanning electron microscopy, Light reflection spectrum and other results were analyzed, the theory and experiment got a good match.