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玻璃材料上的光波导是实现光电印制电路板(EOCB)中导光层制作的重要候选材料,交叉波导是EOCB上常用的集成光学结构,交叉损耗是其关键的参数之一。采用离子交换(IE)法和电场辅助离子迁移(FAIM)技术在玻璃基片上制作了宽分别为5、10、20、30和40μm的垂直交叉光波导,并对波导宽度对波导损耗的影响进行了研究。研究结果表明,玻璃交叉波导损耗对波导宽度有明显的依赖关系,当波导宽从40μm减小到5μm时,交叉波导损耗从0.071dB减小到0.019dB。研究结果可为EOCB上波导交叉结构的优化提供了参考。
The optical waveguide on the glass material is an important candidate material for realizing the light guide layer in the optical printed circuit board (EOCB). The cross waveguide is one of the key parameters commonly used in the EOCB. The cross loss is one of the key parameters. Vertical crossed optical waveguides with widths of 5, 10, 20, 30 and 40μm respectively were fabricated on glass substrates by ion exchange (IE) and electric field assisted ion mobility (FAIM) techniques and the influence of waveguide width on waveguide loss Study. The results show that the cross-waveguide loss has a clear dependence on the waveguide width. When the waveguide width decreases from 40μm to 5μm, the cross-waveguide loss decreases from 0.071dB to 0.019dB. The results provide a reference for the optimization of waveguide cross structure on EOCB.