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苏联格鲁吉亚综合技术研究所研究了钼、钨、铌单晶样品(111)和(110)方向上表面注入氧(剂量1.10~(17)~1.10~(18)/cm~2和能量100 keV)的晶体结构变化情况。用次级离子质谱和电子衍射法分析了200~400℃注入退火后的温度关系。
The Institute of Integrated Technology of the Soviet Union of Georgia studied the implantation of oxygen (dose 1.10-17.17-1.18-18 cm / 2 and energy 100 keV) on the surface of molybdenum, tungsten and niobium single crystal samples (111) and (110) The crystal structure changes. The relationship between the temperature after 200 ~ 400 ℃ injection annealing was analyzed by secondary ion mass spectrometry and electron diffraction.