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考虑固有点缺陷形成E′色心的情况,建立了E′色心形成的动力学模型,得到了高纯硅低能粒子辐照E′色心浓度与辐照剂量的关系式.结果表明,在低辐照剂量下,E′色心浓度随剂量的变化呈线性增长;随着辐照剂量的增加,E′色心浓度随剂量的变化呈饱和趋势.如果进一步考虑E′色心和其他物质反应形成新的稳定结构,E′色心浓度随剂量的变化呈双指数关系,E′色心浓度随剂量的变化不再趋于饱和状态,而是偏离饱和状态.理论结果和实验结果很好地符合,说明建立的模型是有效的.
Considering the intrinsic point defects forming E ’color center, the kinetic model of E’ color center formation was established and the relation between the concentration of E ’center and irradiation dose of high purity silicon low energy particles was obtained. The results show that in the At low irradiation dose, the color center concentration of E ’increased linearly with dose, and with the increase of irradiation dose, the color center concentration of E’ showed a trend of saturation with the change of dosage.If the color center of E ’and other substances The reaction formed a new stable structure, the color center concentration of E ’showed a double exponential relationship with the change of dosage, and the color center concentration of E’ was no longer saturated with the change of dose, but deviated from saturation. The theoretical and experimental results were very good Matching, indicating that the model established is valid.