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采用反应磁控溅射方法制备了一系列不同铝含量的Zr-Al-Si-N复合膜,用能谱仪、X射线衍射仪和显微硬度计对复合膜进行表征,研究了铝元素对Zr-Si-N复合膜的微结构和力学性能的影响。结果表明,当铝的原子分数NAl≤10.84%时,Zr-Al-Si-N复合膜中fcc-(ZrAlSi)N为主要相;当NAl≥14.67%时,Zr-Al-Si-N复合膜是fcc-(ZrAlSi)N和h-AlN的混合相;铝原子分数为4.80%时,Zr-Al-Si-N复合膜的显微硬度达到最大值43.92GPa;随着铝原子含量的进一步增加,Zr-Al-Si-N复合膜的显微硬度迅速下降。对复合膜的致硬机理进行了讨论。
A series of Zr-Al-Si-N composite films with different aluminum contents were prepared by reactive magnetron sputtering. The composite films were characterized by energy dispersive spectroscopy, X-ray diffraction and microhardness tester. Zr-Si-N composite film microstructure and mechanical properties. The results show that fcc- (ZrAlSi) N in Zr-Al-Si-N composite film is the main phase when the atomic fraction of aluminum NAl≤10.84%. When NAl≥14.67%, Zr-Al-Si-N composite film Is the mixed phase of fcc- (ZrAlSi) N and h-AlN. The microhardness of the Zr-Al-Si-N composite film reaches 43.92GPa when the aluminum atomic fraction is 4.80%. With the further increase of aluminum atom content , The microhardness of Zr-Al-Si-N composite film decreased rapidly. The mechanism of the composite film is discussed.