论文部分内容阅读
2000L磁悬浮分子泵研制中,遇到复杂振动问题:转子弯曲模态共振;陀螺效应造成动力学失稳;叶轮叶片导致转子颤振;成因复杂的机电耦合模态振动。它们同时出现,严重影响转子稳定性,给振动抑制带来困难,需进行精细的控制器设计。控制器中,对不同振动采用不同方法抑制:陀螺效应依靠交叉反馈控制;弯曲共振、分子泵叶轮叶片颤振及机电耦合模态振动,依靠各种不同的控制器传递函数相位整形方法。试验验证了方法的有效性,分子泵平稳升速到24000 r/min,样机达到了设计真空性能指标。
In the development of 2000L magnetic levitation molecular pump, complicated vibration problems are encountered: rotor bending mode resonance; gyroscopic effect causing dynamic instability; impeller blades causing rotor chattering; complicated electromechanical coupling mode vibration. They occur simultaneously, seriously affecting the stability of the rotor, vibration control to bring difficulties, the need for sophisticated controller design. In the controller, different methods are used to suppress different vibrations: gyroscopic effect relies on cross-feedback control; bending resonance, molecular impeller blade flutter and electromechanical coupling mode vibration, depending on various controller transfer function phase shaping methods. Experiments verify the effectiveness of the method, the molecular pump steady speed up to 24000 r / min, the prototype has reached the design of vacuum performance.