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针对高功率射频激励轴快流CO_2激光器的射频匹配问题作了实验研究,采用L型匹配网络,对多段并联放电管进行射频匹配实验。在输出激光功率达10kW时,实现了均匀稳定的射频放电,反射率可以控制在2%以内。研究了匹配网络参数不变时,射频电源不同调制模式对反射率的影响。实验研究表明,脉冲宽度调制模式的稳定度要明显高于振幅调制模式。
Aiming at the RF matching problem of fast-flowing CO_2 laser with high-power RF excitation axis, the L-matching network was used to conduct the RF matching experiments for the parallel discharge tubes. In the output laser power up to 10kW, to achieve a uniform and stable radio frequency discharge, reflectivity can be controlled within 2%. The influence of different modulation modes of RF power on the reflectivity is investigated when the matching network parameters are constant. Experimental studies show that the stability of the pulse width modulation mode is significantly higher than the amplitude modulation mode.