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基于高冲击MEMS加速度传感器的冲击灵敏度、频率响应与敏感芯片的结构尺寸存在相互制约关系,提出在满足传感器结构强度和固有频率条件下,提高传感器冲击灵敏度的理论分析、仿真模拟与实验验证的方法;运用ANSYS软件对敏感芯片的弹性膜片厚度与中心岛厚度进行多次设计与仿真,通过多组仿真数据对传感器的结构尺寸进行优化;高冲击实验验证表明,优化的传感器结构尺寸、性能指标能够满足设计要求,冲击灵敏度较高。
Based on the impact sensitivity and frequency response of high-impact MEMS accelerometer and the structure size of the sensitive chip, there is a mutual restraint relationship between them. Theoretical analysis, simulation analysis and experimental verification are presented to improve the sensitivity of the sensor under the condition of satisfying the sensor structural strength and natural frequency . The software ANSYS was used to design and simulate the elastic thickness and center island thickness of the sensitive chip several times. The structure size of the sensor was optimized by multiple sets of simulation data. The high-impact experiments show that the optimized sensor’s structure size, performance index To meet the design requirements, higher impact sensitivity.