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近年来,随着世界各国航天技术发展和其它高新技术领域的应用需求,需要精确测量10-12Pa·m3/s及以下量级的极小气体流量。国防科技工业真空一级计量站经过多年技术攻关,突破了小孔流导的精确测量、基于非蒸散型吸气剂的选择性抽气、固定流导法流量计的测量下限延伸等多项关键技术,在国际上首次提出基于非蒸散型吸气剂的固定流导法测量气体微流量的新方法,将气体微流量的测量下限延伸到10-12Pa·m3/s的极小气
In recent years, with the development of aerospace technology in various countries in the world and the application needs in other high-tech fields, it is necessary to accurately measure the extremely small gas flux on the order of 10-12 Pa · m 3 / s and below. National defense science and technology industrial vacuum level measurement station after years of technical research, breakthrough the precise measurement of pinhole guidance, based on non-evaporable getter selective extraction, fixed flow conductivity method of measuring the lower limit of the extension of a number of key Technology, a new method for measuring micro-flow of gas based on non-evaporable getter-based stationary flow guidance is proposed for the first time in the world. The measurement limit of micro-flow of gas is extended to 10-12 Pa · m3 / s,