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高纯工业气体六氟化钨要求纯度为99.999%以上,其中金属粒子的含量要求在10-8~10-9级。本文结合六氟化钨遇水易分解的性质,设计一种密闭的取样系统,实现了对六氟化钨的准确取样。采用检测限低、灵敏度高的石墨炉原子化法,通过优化测试条件,选择合适的标准溶液范围,测定六氟化钨中微量Fe、Ni、Cu、Zn的含量。该方法不仅重现性好,精密度能够满足测定要求,而且价格相对较低,操作方便,有利于在工业生产中应用。
High purity industrial gas tungsten hexafluoride purity of 99.999% or more, of which the metal particle content requirements in the 10-8 ~ 10-9 level. In this paper, with the nature of hexavalent hexafluoride decomposable in water, a closed sampling system was designed to realize accurate sampling of tungsten hexafluoride. Using graphite furnace atomization method with low detection limit and high sensitivity, the content of trace Fe, Ni, Cu, Zn in tungsten hexafluoride was determined by optimizing the test conditions and selecting the appropriate standard solution range. The method is not only reproducible, the precision can meet the measurement requirements, and the price is relatively low, easy to operate, is conducive to the application in industrial production.