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用一种新型的等离子体浸没式离子注入技术(PIII),在Cr12MoV钢基体上制备了TiN膜,经XPS分析发现,膜中的组织为TiN、TiO2和Ti2O3。对有与无TiN膜的Cr12MoV钢试样进行对比,测定了维氏硬度,耐磨性以及磨痕。结果表明:TiN膜具有高的硬度和优良的抗摩擦性能。
TiN films were prepared on a Cr12MoV steel substrate by a novel plasma immersion ion implantation (PIII) technique. The XPS analysis revealed that the microstructures in the films were TiN, TiO2 and Ti2O3. The Cr12MoV steel samples with and without TiN film were compared to determine the Vickers hardness, wear resistance and wear marks. The results show that: TiN film has high hardness and excellent anti-friction properties.