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采用新清洗工艺对K9玻璃基片进行了清洗,镀制了多种氧化物介质膜,镀膜后的膜层损伤阈值比一般清洗要高出一倍多。用等离子体光法和相衬显微镜观察法相结合来判断损伤,分别用1-on-1测试法和R-on-1测试法确定了膜层的激光损伤阈值。
K9 glass substrate was cleaned by a new cleaning process, and a variety of oxide dielectric films were coated. The damage threshold after coating was twice as high as that of ordinary cleaning. Laser damage threshold was determined by 1-on-1 test and R-on-1 test using the combination of plasma photometry and phase contrast microscopy.