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分析了迈克尔逊干涉仪中动镜和定镜在圆形通光孔径情况下动镜在扫描过程中倾斜对干涉调制度的影响.为满足干涉调制度要求,理论计算发现动镜倾斜角度需控制在1″以内,对应的相位误差为±6.6°以内.为了解决此问题,使动镜和定镜保持准直,采用定镜动态校准系统对动镜倾斜误差进行校准.实验结果表明,校准后的XR和YR相位误差的均方根分别为1.02°和1.25°,满足系统要求.动态校准系统能够有效地校准动镜长距离运动过程中发生的倾斜误差,对高分辨光谱仪的设计和研制具有一定的指导意义.
The influence of the tilt of the moving mirror on the interferometric modulation of the moving mirror in the Micheal interferometer in the case of a circular aperture is analyzed. In order to meet the requirement of the interference modulation, the theoretical calculation shows that the tilt angle of the moving mirror needs to be controlled Within 1 ", the corresponding phase error is within ± 6.6 ° .In order to solve this problem, the movable mirror and the fixed mirror are kept in alignment, and the dynamic mirror calibration system is used to calibrate the tilt error of the movable mirror.The experimental results show that after the calibration The root mean square of phase errors of XR and YR are 1.02 ° and 1.25 °, respectively, to meet the system requirements.Dynamic calibration system can effectively calibrate the tilt error of moving mirror during long-distance movement, A certain guiding significance.