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河北半导体研究所与清华大学联合研制了我国第一台自动对准投影光刻机—ZGK-50型.其自动对准精度为±0.25μm,套刻精度为±1μm,这是对我国半导体工业的一个贡献.本文仅对ZGK-50的自动对准系统电气部分中两个重要问题作了比较深入的分析.其一是如何取出一个稳定的,并能灵敏地反应工作台位置的最佳对准信号,其二是利用功能化简法将逻辑控制电路化简到最简式.
Hebei Institute of Semiconductor and Tsinghua University jointly developed the first automatic alignment projection lithography machine-ZGK-50 type of its automatic alignment accuracy of ± 0.25μm, overlay accuracy of ± 1μm, which is China's semiconductor industry Of the contribution of this article only ZGK-50 auto-alignment system electrical part of the two important issues for a more in-depth analysis of the first one is how to remove a stable and can sensitively respond to the best position of the table position Quasi signal, and the other is the use of simplified method to simplify the logical control circuit to the simplest.