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以钛酸丁酯为前驱体,采用溶胶-凝胶工艺成功制备了TiO2薄膜.利用反射式椭圆偏振光谱仪测量了薄膜的椭偏参量Ψ和Δ,并用Cauchy模型对椭偏参数进行数据拟合,得到了薄膜的厚度和光学常数在380—800nm的色散关系.用分光光度计测量了薄膜的反射率,并用干涉法计算薄膜的厚度;使用原子力显微镜观测了薄膜的表面微结构,分析讨论了不同退火温度处理的薄膜微结构与光学常数之间的关系.研究结果表明,Cauchy模型能较好地符合溶胶-凝胶TiO2薄膜的光学常数色散关系,得到了薄膜的折射率和消光系数随波长的变化规律;薄膜光学常数的大小与薄膜的微结构有关;理论模拟的反射率与实际测量的反射率非常符合;干涉法计算得到的薄膜厚度,与椭偏光谱测试的结果也一致,两者相对偏差仅为2.5%左右.
TiO2 thin film was successfully prepared by sol-gel process using butyl titanate as precursor, the ellipsometric parameters Ψ and Δ of the films were measured by reflection ellipsometry, and the ellipsometric parameters were fitted by Cauchy model, The relationship between the film thickness and the dispersion of the optical constants was obtained at 380-800 nm.The reflectance of the film was measured by spectrophotometer and the thickness of the film was calculated by the interference method.The surface microstructure of the film was observed by atomic force microscopy Annealing temperature treatment of thin film microstructure and optical constants.The results show that the Cauchy model can be well in line with the optical constant dispersion of the sol-gel TiO2 film dispersion obtained refractive index and extinction coefficient of the film with the wavelength The optical constant of the film is related to the microstructure of the film. The theoretical simulated reflectance is in good agreement with the measured reflectance. The film thickness calculated by the interferometry method is also consistent with the result of the ellipsometry. The deviation is only about 2.5%.