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本文概述了电子气体的种类、纯度以及其应用状况,综述了电子气体中几种常见杂质包括氧气、一氧化碳、二氧化碳、碳氢化合物、水分的不同分析方法以及几种特殊杂质氟化氢和金属粒子的不同处理方法,文中详细说明了各种分析方法如:比色法、黄磷发光法、电化学法、传感器法、电解法、露点法的测定原理以及具体的分析步骤,另外针对近年来发展的几种新型分析方法色谱-质谱、色谱-红外光谱、色谱-原子光谱做了简单介绍,指出了电子气体分析方法的重要意义及发展前景。
This paper summarizes the types and purities of electronic gases and their applications. The different analytical methods for several common impurities in electronic gases, including oxygen, carbon monoxide, carbon dioxide, hydrocarbons, and moisture, and the differences between several special impurities of hydrogen fluoride and metal particles Processing methods, the paper detailed description of a variety of analytical methods such as: colorimetric method, yellow phosphorus luminescence, electrochemical method, sensor method, electrolysis, dew point determination principle and the specific analysis steps, the other for the development in recent years The new analytical methods are described briefly in chromatography-mass spectrometry, chromatography-infrared spectroscopy, and chromatography-atomic spectroscopy. The importance and prospects of electronic gas analysis methods are pointed out.