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介绍了非晶半导体薄膜的结构特点和在光电器件上的独特性能,给出了薄膜器件的发展太平和制膜技术、制膜设备的研究现状。
The structural characteristics of amorphous semiconductor thin films and their unique properties on optoelectronic devices are introduced. The development of thin film devices is also presented.