采用1.330μm附近波长的近红外可调谐分布反馈(DFB)激光器作为光源,结合波长调制技术和长光程技术,实时监测工业环境中的HF气体浓度。同时采用Allan方差分析系统的稳定性,选择利用非线性最小二乘法和防脉冲滑动平均滤波等技术手段,长时间测试结果表明,该系统具有实时、连续和非接触快速检测的特点,并且具有大范围、分布式监测的能力,可以满足工业环境中HF气体无组织排放安全检测的需求。 The near infrared tunable distributed feedback (DFB) laser with the wavelength of 1.330μm is used as the light source. The wavelength modulation technology and the long optical path technology are used to monitor the concentration of HF gas in industrial environment in real time. At the same time, the stability of Allan variance analysis system was adopted. The nonlinear least square method and anti-pulse sliding average filter were selected. The long time test results show that the system has the characteristics of real-time, continuous and non-contact rapid detection, Range, distributed monitoring capabilities to meet the industrial environment of unorganized emissions of HF gas safety testing needs.