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在一种新颖的快速光刻模拟算法的基础上 ,提出了一种新的基于稀疏空间点光强计算的二维成像轮廓提取算法 .该算法能够根据版图特点合理选择采样线的位置 ,有效地确定轮廓线存在的范围 ,并根据在采样线上光强单调分布的特性来快速地搜寻轮廓点 .实验表明 ,这是一种快速高效的轮廓提取方案 ,能够适应光学邻近校正中巨大的运算量 .
Based on a novel fast lithography simulation algorithm, a new 2D contour extraction algorithm based on sparse spatial light intensity calculation is proposed, which can select the position of sampling line reasonably according to the characteristics of layout and effectively Determine the range of the existence of the contour line, and quickly search for the contour point according to the monotonous distribution of light intensity on the sampling line.Experiments show that this is a fast and efficient contour extraction scheme, which can adapt to the huge amount of computation in optical proximity correction .