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闭管软着陆扩散系统采用闭管扩散的方式。碳化硅浆把石英舟放入石英管后再退出石英管,保证整个工艺过程完全不受外界环境干扰。系统整机清洁降低了石英制品清洗的频次。控制终端采用专业工控机配备进口温控仪表、质量流量计及完善的报警功能。本设备可用于集成电路,分立器件,光电器件,电力电子器件,大规模集成电路等领域对晶片进行扩散,氧化,合金,退火及烧结等工艺,可用于2~8英寸工艺尺寸。第三代闭管软着陆扩散系统主要优势工艺运行稳定、均匀、可靠;设备温度控制系统气体控制系统取送片系统管内压力稳定系
Closed-tube soft landing diffusion system using closed-tube proliferation of ways. Carborundum put the quartz boat into the quartz tube and then exit the quartz tube to ensure that the entire process is completely free from interference from the external environment. System cleaning reduces the frequency of cleaning quartz products. Control terminal using a professional IPC equipped with imported temperature control instruments, mass flow meter and improve the alarm function. The device can be used in IC, discrete devices, optoelectronic devices, power electronics, large scale integrated circuits and other areas of the wafer diffusion, oxidation, alloy, annealing and sintering process can be used for 2 to 8 inches process size. The main advantages of the third generation of closed-loop soft landing and diffusion system are stable, uniform and reliable operation of the equipment; temperature control system of the equipment gas control system pick-up sheet system tube pressure stability