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本工作利用透射电镜对电子束增强热丝化学汽相沉积金刚石薄膜的微观结构及生长方式进行了研究。观察表明:外强颜色不同的金刚石膜,其内部晶粒尺寸、缺陷类型和生长方式也不同。主要归纳为两类:一类是以五次孪生方式生长;另一类是以位错和微孪晶共存生长。
In this work, the microstructure and growth mode of electron beam enhanced hot filament CVD diamond films were studied by transmission electron microscopy. Observation shows that: the strong outer color of the diamond film, the internal grain size, defect types and growth methods are also different. Mainly into two categories: one is based on five twin growth; the other is the coexistence of dislocation and micro-twin growth.