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报道了一种以ZrOCl2·8H2O为源,溶胶一凝胶法制备高激光负载高折射率薄膜的新方法。薄膜采用旋转镀膜法制备,对薄膜的结构、光学特性及激光损伤阈值进行了测量,有机粘接剂对薄膜折射率及机械强度的影响也作了探讨。以该薄膜与SiO2溶胶一凝胶膜交替涂覆制成的多层高反膜,剩余透过率仅0.98%,激光损伤阈值达16J/cm2(3us)。
A new method for preparing high laser-loaded high refractive index films using ZrOCl2 · 8H2O as a source and a sol-gel method was reported. The film was prepared by spin coating method. The structure, optical properties and laser damage threshold of the film were measured. The effect of organic adhesive on the refractive index and mechanical strength of the film was also discussed. The thin film and SiO2 sol-gel film alternately coated multi-layer high reflectivity film, the residual transmittance of only 0.98%, the laser damage threshold of 16J / cm2 (3us).