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微型压电超声马达定子表面的振动幅度是难以检测的动态微小量。定子振动状态将直接关系到压电马达的实现与否。首次分析了采用均分电极结构的微型压电超声行波马达的定子表面的振动振幅。通过对影响定子振幅相关因素的分析，表明要获得最佳的表面振动效果，压电薄膜与弹性体的厚度必须相匹配。
The vibration amplitude of the micro piezoelectric ultrasonic motor stator surface is hard to detect the dynamic micro-volume. The vibration state of the stator will be directly related to the realization of the piezoelectric motor or not. For the first time, the vibration amplitude of the stator surface of a micro piezoelectric ultrasonic traveling wave motor adopting a uniform electrode structure is analyzed. Through the analysis of the factors that affect the amplitude of the stator, the thickness of the piezoelectric film and the elastomer must be matched in order to obtain the best surface vibration effect.