一、引言日本日立制作所从事半导体压力传感器的研制工作已经多年,它所研制的应变仪式传感器(SG传感器)是一种硅膜片式传感器。自1978年出售以来,几经改进,精度大有提高。通过应变仪的合理配置,可将非线性误差限制在最小范围之内,精度可高达±0.2％以上。但在下面两种情况下非线性误差的影响是不可忽略的:(1)压力很低。因为被测压力低,硅膜片需要做得大而薄,故受压产生变形,引起非线性误差。(2)正反两个方向受压。这种情 I. INTRODUCTION Hitachi has been engaged in the research and development of semiconductor pressure sensor for many years. Its strain gauge sensor (SG sensor) is a silicon diaphragm sensor. Since its sale in 1978, the accuracy has been greatly improved after several improvements. Through the reasonable configuration of the strain gauge, the nonlinear error can be limited within the minimum range, the accuracy can be as high as ± 0.2%. However, the influence of non-linearity error can not be neglected in the following two situations: (1) The pressure is low. Because the measured pressure is low, the silicon diaphragm needs to be made large and thin, so the pressure generated deformation, causing nonlinear error. (2) both positive and negative pressure. This situation