【摘 要】
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The relative sputtering yield induced by highly charged Arq+ impacting on Nb surface is investigated. The yield increases drastically as the incidence angle inc
【机 构】
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School of Nuclear Science and Technology, Lanzhou University, Lanzhou 730000“,”Institute of Modern P
论文部分内容阅读
The relative sputtering yield induced by highly charged Arq+ impacting on Nb surface is investigated. The yield increases drastically as the incidence angle increases. A formula Y = A* tanB(θ) + C, developed from classical sputtering theory, fits well with the yield. By analysing a series of coefficients A and C extracted by curve fitting,the results demonstrate the presence of a synergy of the linear cascade collision and potential energy deposition.
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