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针对微机电系统(MEMS)中微小器件的表面刻蚀沟槽及台阶的测量,研制采用步进电机运动平台和微力电感测头,用变截面片簧作回转运动的测头支撑机构,对运动平台存在的偏心作用力和振动噪声问题做了分析和研究,提出了有效的解决方案。
Aimed at the measurement of the surface etched grooves and steps of micro devices in microelectromechanical system (MEMS), a probe support mechanism using stepper motor motion platform and micro force inductive probe and variable cross section leaf spring for slewing motion was developed. Platform eccentricity and vibration noise problems have been analyzed and studied, put forward an effective solution.