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采用热丝化学汽相淀积 (CVD) ,未用别的辅助措施 ,合成了 (10 0 )晶面的金刚石膜。结合CVD金刚石成核的微观过程 ,探讨了定向金刚石膜的形成机理。发现和研究了表面扩散对CVD金刚石成核的重要影响。
Hot filament chemical vapor deposition (CVD) was used to synthesize diamond films with (10 0) crystal plane without any other auxiliary measures. Combined with the microscopic process of CVD diamond nucleation, the formation mechanism of oriented diamond film was discussed. The important influence of surface diffusion on CVD diamond nucleation was discovered and studied.