氦质谱检漏仪是当前用得最广、灵敏度最高的一种检漏仪器。它不仅能确定出极微小漏孔的位置,而且还能通过标准漏孔测量出该漏孔的漏率。因此,在真空技术,气体和液体的贮存和输送(特别是低温液体)装置等方面均得到了广泛应用。然而,如何充分发挥仪器的效能和提高检漏结果的可信度,确是值得认真对待的重要问题。既然被检件经过了检漏,那 Helium mass spectrometer leak detector is the most widely used, the highest sensitivity of a leak detector. Not only does it determine the location of tiny leaks, it also measures the leak rate of the leak through standard leaks. Therefore, vacuum technology, gas and liquid storage and delivery (especially cryogenic liquid) devices have been widely used. However, how to give full play to the effectiveness of the instrument and improve the credibility of the leak detection results is indeed an important issue worth serious consideration. Since the inspection after the leak, then