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一、前言 随着半导体工业的迅速发展,特别是大规模集成电路在较短的时间内获得飞速发展,对整个电子工业起着推动作用。为了展望大规模集成电路的发展前景,可以认为二十世纪七十年代是大规模集成电路的全盛时代。但大规模集成电路之所以能如此发展,是与集成电路所用的材料发展联系在一起的,尤其是基础材料更是大规模集成电路的基础。由于大规模集成电路功能复杂,对基础材料的要求就更高。倘若在电路生产过程中混入不应有的杂质,就会直接影响到集成电路的性能和成品率。因而近年来,随着器件
I. Introduction With the rapid development of the semiconductor industry, especially large-scale integrated circuits, the rapid development in a relatively short period of time has played a catalytic role in the entire electronics industry. In order to look forward to the development prospects of large scale integrated circuits, it can be considered that the 1970s was the heyday of large scale integrated circuits. However, the reason why LSIs can be developed in this way is that they are linked to the development of materials used in integrated circuits. In particular, basic materials are the foundation of LSIs. Due to the complex functions of large scale integrated circuits, the requirements for basic materials are even higher. If the circuit in the process of mixing unwanted impurities, it will directly affect the integrated circuit performance and yield. Thus in recent years, with the device