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所谓超晶格是指1970年江崎玲於奈博士同R.Tsu博士一起提出的人工超晶格物质而言。它是把两种半导体物质,厚度大约按着电子的德波罗意波长,周期地重叠起来的异质结多层薄膜。这样的物质在自然界是不存在的,它要通过分子束外延(MBE)、有机金属化学汽相淀积(MO-CVD)等晶体生长技术的不断提高才能制备出来。因为这两种技术不仅能进行二维晶体生长,并能控制到单分子层量级。
The so-called superlattice refers to the artificial superlattice material put forward by Dr. Ezaki Ezaki and Dr. R. Tsu in 1970. It is a heterojunction multilayer film that periodically overlaps two semiconductor materials at a thickness approximately equal to the electron’s de Borrowing wavelength. Such material does not exist in nature. It can be prepared by the continuous improvement of crystal growth techniques such as molecular beam epitaxy (MBE) and metal-organic chemical vapor deposition (MO-CVD). Because these two technologies can not only do two-dimensional crystal growth, and can control the order of the monolayer.