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基于诱导反射原理设计了一种可见光波段金属-介质薄膜结构的反射型彩色滤光片。高吸收铬和高反射铝的应用使它既能获得高反射率又有很高的宽波段截止度,通过改变介质匹配层的厚度实现适当的导纳匹配,得到了反射率大于72%、较高色饱和度的红绿蓝三色滤光片。实验制作了样品,测试结果与设计相吻合。基于半色调技术,采用光刻和剥离工艺制备了不同面积占空比的滤光片阵列,实现了高分辨率、介于红绿蓝三色之间中间色的光学反射单元。
Based on the principle of induced reflection, a reflective color filter with visible-band metal-dielectric film structure is designed. The application of high absorption chromium and high reflection aluminum makes it possible to obtain both high reflectivity and high broadband cutoff. By adjusting the thickness of the matching layer, proper admittance matching is achieved, and the reflectivity is higher than 72% High saturation of the red, green and blue filters. Experiments produced samples, the test results and design coincide. Based on the half-tone technology, a filter array with different area duty ratios was prepared by using photolithography and lift-off process, and a high-resolution optical reflection unit with a middle color between red, green and blue was realized.