利用微波ECR全方位离子注入技术,在单晶硅(100)衬底上制备类金刚石薄膜.分析结果表明,所制备的类金刚石碳膜具有典型的类金刚石结构特征,薄膜均匀、致密,表面粗糙度小,摩擦系数小.其中,薄膜的结构和性能与氢流量比关系密切,随氢流量比的增加,薄膜的沉积速率减小,表面粗糙度降低,且生成sp3键更加趋向于金刚石结构,表面能更低,从而使摩擦系数大幅降低. The diamond-like carbon films were prepared on a monocrystalline silicon (100) substrate by microwave ECR ion-implantation technique.The results show that the diamond-like carbon films have the typical diamond-like structure, the films are uniform and dense, and the surface roughness The friction coefficient is small, the structure and performance of the film are closely related to the hydrogen flow rate, the deposition rate decreases and the surface roughness decreases with the increase of the hydrogen flow rate ratio, and the sp3 bond is generated more toward the diamond structure, Lower surface energy, so that the friction coefficient significantly reduced.