为了提高硅微陀螺仪性能,分析了驱动和检测模态方程。提出了一种新型的方案,通过傅里叶变换算法计算驱动振荡幅值,通过自动增益控制算法将幅值稳定在设定值。设计了基于FPGA的控制电路,进行了相关实验。结果表明该方法能准确地检测驱动幅值,在温度25℃时的幅值相对误差小于2×10-5,在–40℃到60℃的温度变化过程中幅值相对误差小于3×10-5。因此,提出的方案是可行的和有效的。 In order to improve the performance of silicon micro-gyroscope, the driving and testing modal equations are analyzed. A new scheme is proposed. The amplitude of drive oscillation is calculated by Fourier transform algorithm, and the amplitude is stabilized at the set value by automatic gain control algorithm. The control circuit based on FPGA is designed and related experiments are carried out. The results show that the method can accurately detect the driving amplitude, the relative error of the amplitude at 25 ℃ is less than 2 × 10-5, and the relative error of the amplitude during the temperature change from -40 ℃ to 60 ℃ is less than 3 × 10- 5. Therefore, the proposed solution is feasible and effective.