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通过对产生孪晶的工艺条件的研究比较,分析了LEC-InP晶体中产生孪晶的原因。实验证明,建立一个稳定合适的热场、保持B_2O_3的透明度、控制好掺杂量等是减少孪晶的必要条件。
Through the comparison and analysis of the process conditions of twinning, the reason of twins in LEC-InP crystal was analyzed. Experiments show that the establishment of a stable and suitable thermal field, to maintain the transparency B_2O_3, control the amount of doping is to reduce the necessary conditions for twins.