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本文介绍声发射技术在判断划痕临界载荷以推定膜层与基材结合情况的研究结果。实验的试样是玻璃基材真空蒸镀铝膜、软钢上电镀镍层以及不同硬度的钢样上离子镀超硬氮化钛膜层。在脆性硬质基材上无论镀软膜或硬膜,划痕试验中一旦监听到声发射信号即表明基材与膜层结合失效,此时的划痕载荷即为临界载荷。塑性基材镀软膜层直到划痕到基材也无声发射信号出现。超硬膜层与钢基材的划痕试验中,声发射信号出现时载荷往往低于临界载荷。两者的差值决定于超硬膜的厚度和膜层与基材的硬度差。
This article describes the results of acoustic emission techniques in determining the critical load of scratches to predict the combination of film and substrate. The experimental samples were vacuum deposition of aluminum substrate on glass substrate, electroless nickel plating on mild steel and ion plating superhard titanium nitride film on steel samples with different hardness. Whether on the brittle hard substrate plating soft or hard film, scratch test once heard sound emission signal that the substrate and the film combination failure, then the scratch load is the critical load. Plastic substrates are plated with a soft film until no scratches are visible from the substrate. Scratch test of super-hard film and steel substrate, the acoustic emission signal appears when the load is often lower than the critical load. The difference between the two depends on the thickness of the superhard film and the difference between the hardness of the film and the substrate.