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通过更换丝杠和更新电机控制系统增大了靶盘纵向扫描范围 ,解决了扫描过程中纵向电机经常停转问题 ,并使靶室可装载 10 cm(4in)片子 ;通过隔离外界干扰电信号、精确控制扫描面积和对二次电子抑制电极的改进使注量测量误差达到了实验要求
By changing the screw and updating the motor control system, the longitudinal scanning range of the target disk is enlarged, the longitudinal motor is stopped frequently during scanning, and the target chamber can be loaded with 10 cm (4in) film. By isolating the external interference electric signal, Precise control of scanning area and improvement of the secondary electron suppression electrode make the measurement error of the measurement reach the experimental requirement