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一、引言 辉光放电是清洗锻炼环流器真空室器壁的有效手段。H_2辉光放电时,氢离子轰击器壁与器壁中的C和O发生化学反应,生成CH_4,H_2O等气体;同时,这些离子提供能量使得吸附在器壁表面的杂质气体脱附,从而被泵出真空室外,达到清洗锻炼的目的。由于辉光放电时,离子轰击的能量较高,会引起一定的溅射沉积。我们在模拟真空室(六通装置)进行了辉光放电,对各种参数下的离子能量进行了测量,从中找出了离子能量与极间电压(阳极与器壁之间的电压)、放电电流、以及气压、离子流密度之间的某些关系。
I. INTRODUCTION Glow discharge is an effective way to clean the wall of the vacuum chamber of the circulating device. H 2 glow discharge, the hydrogen ion bombardment wall and the wall of the C and O chemical reaction occurs, generating CH_4, H_2O and other gases; the same time, these ions provide energy adsorbed on the wall surface of the impurity gas desorption and was Pump out the vacuum chamber to achieve the purpose of cleaning exercise. As glow discharge, ion bombardment of higher energy, will cause some sputtering deposition. We conducted a glow discharge in an analog vacuum chamber (six-way device), measuring the ion energies under various parameters, from which we found the ion energy and the voltage between the electrodes (the voltage between the anode and the wall) Current, and some relationship between air pressure and ion current density.