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介绍了一种应用于毫米波晶圆级集成基于Si-BCB工艺的Ka波段双模带通滤波器。微带线结构的全波长谐振器具有低辐射特性,全波长环形阶跃阻抗谐振器(step impedance resonator,SIR)有两种正交谐振模式,可以减小滤波器尺寸。通过对基于环形谐振器的双模滤波器进行奇偶模分析,确定谐振器的设计参数。采用宽边耦合结构设计输入输出端口,具有高耦合度。仿真结果表明中心频率35GHz,通带内插损1.2dB,回波损耗优于30dB,BW3dB为15%。最后,采用Si-BCB工艺制作滤波器并完成测试。测试结果为中心频率33.3GHz,通带内插损1.17dB,回波损耗优于30dB,BW3dB为18%。测试结果与仿真结果基本吻合。
A Ka-band dual-mode band-pass filter based on Si-BCB process for millimeter-wave wafer level integration is introduced. The full-wavelength resonator with a microstrip structure has low emissivity and the full-wavelength step-step resonator (SIR) has two modes of quadrature resonance that reduce the size of the filter. The design parameters of the resonator are determined by performing odd-even mode analysis of the ring resonator-based dual-mode filter. Wide-brimmed coupling structure design input and output ports, with a high degree of coupling. The simulation results show that the center frequency is 35GHz, the passband insertion loss is 1.2dB, the return loss is better than 30dB and the BW3dB is 15%. Finally, using Si-BCB process to make filters and complete the test. Test results for the center frequency of 33.3GHz, the passband insertion loss of 1.17dB, return loss better than 30dB, BW3dB of 18%. The test results are in good agreement with the simulation results.