论文部分内容阅读
提出一种基于双波干涉的台阶高度光纤在线干涉测量系统。利用光纤光栅(FBG)只反射布拉格波长的特性,使两个波长同时并独立地工作于同一个光纤干涉测量系统中,每个波长的干涉信号分别并同时被探测,将测量量程扩大为半合成波波长。利用反馈电路补偿环境干扰对光纤干涉测量系统的影响,使光纤干涉测量系统适合于在线测量。本光纤干涉测量系统可测量的最大台阶高度达1mm,测量分辨率小于1nm。
A double-wave interference based on-line optical fiber interferometry system is proposed. The FBG only reflects the Bragg wavelength characteristics, so that the two wavelengths can work simultaneously and independently in the same optical fiber interferometry system. The interference signals of each wavelength are respectively and simultaneously detected, and the measurement range is expanded to semi-composite Wavelength. The feedback circuit is used to compensate the influence of environmental interference on the optical fiber interferometry system and make the optical fiber interferometry system suitable for on-line measurement. This fiber optic interferometric measurement system can measure the maximum step height of 1mm, measurement resolution is less than 1nm.