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介绍了一种新型的磁控／流体动力学控制的大口径长通道直流电弧等离子体炬，并据此设计建 造了 １００千瓦级高功率 ＤＣ Ａｒｃ Ｐｌａｓｍａ Ｊｅｔ ＣＶＤ金刚石膜沉积系统 讨论了该系统采用的半封闭式 气体循环系统的工作原理，以及在气体循环条件下制备大面积高光学质量金刚石自支撑膜的研究结果
A new magnetron / hydrodynamically controlled large-diameter long-channel DC arc plasma torch was introduced and a 100 kW high-power DC Arc Plasma Jet CVD diamond film deposition system was designed and constructed to discuss the application of this system The working principle of semi-closed gas circulation system and the research results of preparing large area high optical quality diamond self-supporting membrane under gas circulation