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I—V特性法表明单层LB聚酰亚胺膜(～0.5nm)MIS结构的界面态密度为10~(12)～10~(13)cm~(-2)eV~(-1)。对11和41层LB聚酰亚胺膜,DLTS测试得到的界面态密度分别为10~(12)～10~(13)和10~(11)～10~(12)cm~(-2)eV~(-1)。所有结果表明,在硅禁带中央附近具有较大的界面态密度。
The I-V characteristic method shows that the interface state density of single-layer LB polyimide films (~ 0.5nm) is 10 ~ (12) ~ 10 ~ (13) cm ~ (-2) eV ~ (-1). For the 11 and 41 layer LB polyimide films, the interface state densities obtained by DLTS were 10 ~ (12) ~ 10 ~ (13) and 10 ~ (11) ~ 10 ~ (12) cm ~ eV ~ (-1). All the results show that there is a large interface state near the center of the band gap.