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为实现高精度瑞奇-康芒法检测,利用检测系统光瞳面与被测平面镜二者间的坐标转换关系,结合最小二乘法直接对测得的系统波像差进行恢复,通过两角度检测分离由光路调整引入的离焦误差,得到更为精准的平面镜面形。分析光路中测试距离对坐标转换关系以及瑞奇角求解精度的影响,根据仿真分析结果确定实验方案。实验中采用两角度检测,对测试波前进行恢复并分离系统调整误差后,最终得到被检平面镜面形,结果峰谷(PV)值为0.182λ、均方根(RMS)值为0.0101λ,对比干涉仪直接检测结果 PV值为0.229λ、RMS值为0.013λ,PV检测精度优于λ/20,RMS检测精度优于λ/100,实验结果证明了此种面形恢复方法的有效性以及测试距离精度分析理论的正确性,从而实现了瑞奇-康芒法高精度检测。
In order to achieve high-precision Ricky-Commen method, the coordinate system of the pupil plane of the detection system and the measured plane mirror is used to reconstruct the measured system wave aberration directly with the least square method, Separating the defocus error introduced by the adjustment of the optical path, a more precise plane mirror surface shape is obtained. The influence of the test distance in the optical path on the coordinate transformation and the precision of the Ridge angle is analyzed. The experimental scheme is determined according to the simulation results. After the test wavefront was recovered and the system adjustment error was separated, the mirror plane of the tested plane was finally obtained. The results showed that the peak-to-valley (PV) value was 0.182λ and the root mean square (RMS) value was 0.0101λ. Compared with the interferometer, PV value of 0.229λ and RMS value of 0.013λ, PV detection accuracy is better than λ / 20, RMS detection accuracy is better than λ / 100, the experimental results show the effectiveness of this method of face shape recovery and Test the accuracy of the theory of distance accuracy, so as to achieve the Ricky - Kang Man method of high precision detection.