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表面粗糙度和表面轮廓的传统测量方法,是在被测表面上移动金刚石触针。然而,这类测量仪器有许多缺点,如易使软表面损伤、扫描时间长和校准步骤严格。同时,对一个面扫描需要进行多次光栅扫描。用光学相位干涉测量法一次测量一个面。这是一种快速测量法,它能根据所用的光波长自动地进行测量,Atos公司的Promap相位测量显微镜可对样品作非接触定量三维表面测量,如金刚石机械零件、半导体产品、抛光材料、磁性介质及读/写头、塑料、金属、光纤和其它表面。
The traditional measurement of surface roughness and surface profile is to move the diamond stylus over the surface under test. However, such measuring instruments have many disadvantages, such as easy damage to soft surfaces, long scan times and strict calibration procedures. At the same time, multiple scans of a surface are required. Optical phase interferometry is used to measure one face at a time. This is a fast measurement method that automatically measures the wavelength of light used. Atos Promap Phase Measurement Microscopes make non-contact quantitative three-dimensional surface measurements of samples such as diamond mechanical parts, semiconductor products, polishing materials, magnetic Media and read / write head, plastic, metal, optical fiber and other surfaces.