紫外超短脉冲在KrF准分子激光放大器中放大时,由于CaF2窗镜中的GVD效应与SPM效应的共同作用,对脉冲引入了啁啾,并且含有非线性啁啾,引起了脉宽的展宽,且限制了利用负线性啁啾补偿对脉宽的压缩,因此,需采取适当的方法对啁啾进行补偿,且进一步压缩脉宽。本实验采用熔石英体材料与 When ultrashort UV pulses are amplified in the KrF excimer laser amplifier, chirp is introduced into the pulse due to the combination of GVD effect and SPM effect in CaF2 window mirrors, and non-linear chirp is introduced, which causes pulse width broadening, And limit the use of negative linear chirp compensation of the pulse width compression, therefore, take appropriate measures to compensate for the chirp, and further compress the pulse width. The experiment using fused quartz material and