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为了提高数字微镜器件(DMD)的空间光调制性能,发挥其在光信息处理中的作用,研究了的数字微镜器件相位调制性质。通过分析数字微镜器件的微观物理结构,考察了数字微镜器件的光栅特性;从计算的角度研究了其对相干光波的相位调制,并给出数学描述和实验结果。重点研究了数字微镜器件的衍射光栅特性,分析了其工作原理及微镜偏转导致的镜片空间相对位置的改变,利用闪耀光栅理论计算了偏转微镜间的相位差,得出了数字微镜器件光栅的闪耀规律,实现了闪耀状态。提出了利用不同方向的微镜列状态研究数字微镜器件相位调制性质的方法,推导和模拟了关于数字微镜器件的微结构和工作原理,在数字微镜器件光调制研究方面提供了一些结果,对数字微镜器件在信息光学中的更广泛应用有一定意义。
In order to improve the spatial light modulation performance of the digital micromirror device (DMD) and to play its role in optical information processing, the phase modulation properties of the digital micromirror device are studied. By analyzing the micro-physical structure of the digital micromirror device, the grating characteristics of the digital micromirror device are investigated. The phase modulation of the coherent light wave is studied from the computational point of view, and the mathematical description and experimental results are given. The characteristics of the diffraction grating of the digital micromirror device are studied. The principle of the diffraction grating and the change of the relative position of the lens due to the micromirror deflection are analyzed. The phase difference between the micromirrors is calculated by using the blazed grating theory. Device grating shine law, to achieve a shining state. A method to study the phase modulation properties of digital micromirror devices based on the state of micromirrors in different directions was proposed. The microstructure and working principle of digital micromirror devices were deduced and simulated. Some results were provided in the research of optical micromirror devices , Have certain significance to the digital micromirror device in the wider application of information optics.